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Effect of a surface inhibition layer on line edge roughnessa)
a)No proof corrections received from author prior to publication.
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10.1116/1.1926292
/content/avs/journal/jvstb/23/3/10.1116/1.1926292
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/3/10.1116/1.1926292
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Cross sections for no-delay and delay patterns at : (a) no-delay with modulation of 100%; (b) delay with modulation of 100%; (c) no-delay with modulation of 70%; (d) delay with modulation of 70%.

Image of FIG. 2.
FIG. 2.

Top down views for patterns at with modulation of 100%: (a) no-delay; (b) delay.

Image of FIG. 3.
FIG. 3.

LER and CD comparison between no-delay and delay patterns: (a) LER comparison at ; (b) CD comparison at ; (c) LER comparison between and .

Image of FIG. 4.
FIG. 4.

(a) UV-5 with delay and HMDS; (b) PMMA with HMDS; (c) UV5 without delay and HMDS.

Image of FIG. 5.
FIG. 5.

Acid depletion probability with different acid depletion thickness .

Image of FIG. 6.
FIG. 6.

Pattern cross sections: (a) No acid depletion on both top and bottom; (b) with acid depletion on both top and bottom, and on top; (c) with acid depletion on both top and bottom, and on top.

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/content/avs/journal/jvstb/23/3/10.1116/1.1926292
2005-06-03
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of a surface inhibition layer on line edge roughnessa)
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/3/10.1116/1.1926292
10.1116/1.1926292
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