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Effect of a surface inhibition layer on line edge roughnessa)
a)No proof corrections received from author prior to publication.
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10.1116/1.1926292
/content/avs/journal/jvstb/23/3/10.1116/1.1926292
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/3/10.1116/1.1926292
/content/avs/journal/jvstb/23/3/10.1116/1.1926292
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/content/avs/journal/jvstb/23/3/10.1116/1.1926292
2005-06-03
2014-10-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of a surface inhibition layer on line edge roughnessa)
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/3/10.1116/1.1926292
10.1116/1.1926292
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