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Highly -axis oriented thin AlN films deposited on gold seed layer for FBAR devices
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10.1116/1.1941249
/content/avs/journal/jvstb/23/4/10.1116/1.1941249
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/4/10.1116/1.1941249
/content/avs/journal/jvstb/23/4/10.1116/1.1941249
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/content/avs/journal/jvstb/23/4/10.1116/1.1941249
2005-07-20
2014-10-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Highly c-axis oriented thin AlN films deposited on gold seed layer for FBAR devices
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/4/10.1116/1.1941249
10.1116/1.1941249
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