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Surface etching of YBCO films by xenon difluoride
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View: Figures


Image of FIG. 1.
FIG. 1.

Diagram of reaction chamber components.

Image of FIG. 2.
FIG. 2.

X-ray diffraction patterns for predominately -axis (a) and mixed -axis oriented (b) YBCO films.

Image of FIG. 3.
FIG. 3.

(a,b) AFM micrograph of a YBCO -axis surface before (a) and after (b) etching.

Image of FIG. 4.
FIG. 4.

AFM micrograph of YBCO -axis surface after etching. Left side of specimen was protected against reaction with the by photoresist, which was then removed for the AFM measurements. Average step height: .

Image of FIG. 5.
FIG. 5.

(a,b) AFM micrograph of YBCO mixed -axis surface (a) before and (b) after etching.

Image of FIG. 6.
FIG. 6.

SEM micrograph of -axis surface showing Cu-rich particulates protruding from the after etching.

Image of FIG. 7.
FIG. 7.

Auger spectrograph (AES) of the (dark) particulates and (light) background regions shown in the SEM micrograph of Fig. 6.

Image of FIG. 8.
FIG. 8.

Composition profiles of an -axis oriented pair for (a) unetched and (b) etched surfaces.

Image of FIG. 9.
FIG. 9.

ESCA depth profile of the barium energy peak in a YBCO specimen before and after reaction with . The energy of the shift near the surface is larger after the processing.

Image of FIG. 10.
FIG. 10.

Plot of YBCO film resistance as a function of temperature for same film before and after etching.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Surface etching of YBCO films by xenon difluoride