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Ohmic contact formation mechanism of and metallizations on HEMTs
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10.1116/1.2101691
/content/avs/journal/jvstb/23/6/10.1116/1.2101691
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/6/10.1116/1.2101691
/content/avs/journal/jvstb/23/6/10.1116/1.2101691
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/content/avs/journal/jvstb/23/6/10.1116/1.2101691
2005-10-31
2015-05-03
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ohmic contact formation mechanism of Ta∕Al∕Mo∕Au and Ti∕Al∕Mo∕Au metallizations on AlGaN∕GaN HEMTs
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/6/10.1116/1.2101691
10.1116/1.2101691
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