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Dynamic alignment control for fluid-immersion lithographies using interferometric-spatial-phase imaging
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10.1116/1.2101725
/content/avs/journal/jvstb/23/6/10.1116/1.2101725
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/6/10.1116/1.2101725
/content/avs/journal/jvstb/23/6/10.1116/1.2101725
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/content/avs/journal/jvstb/23/6/10.1116/1.2101725
2005-12-01
2014-12-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dynamic alignment control for fluid-immersion lithographies using interferometric-spatial-phase imaging
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/6/10.1116/1.2101725
10.1116/1.2101725
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