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Achromatic spatial frequency multiplication: A method for production of nanometer-scale periodic structures
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10.1116/1.2121735
/content/avs/journal/jvstb/23/6/10.1116/1.2121735
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/6/10.1116/1.2121735
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Calculated intensity distribution behind a grating illuminated by a normally incident monochromatic plane wave. The grating consists of open slits in a perfectly absorbing film. The period of the pattern and the wavelength are and , respectively. (b) Profiles of the image at two image planes, and .

Image of FIG. 2.
FIG. 2.

(a) Calculated intensity distribution showing the achievement of stationary image using wideband illumination. (b) Profile of the image in part (a) along a vertical line running across the center of the image (i.e., ). (c) Mask transmission and the profile of the stationary intensity distribution obtained at large . The plots correspond to cross sections of the image in part (a) at and .

Image of FIG. 3.
FIG. 3.

(a) Transmission of the two-dimensional mask showing four unit cells of the periodic structure. (b) and (c) Calculated images at two positions. (d) Profiles of the images in (a) and (c) along the dashed lines.

Image of FIG. 4.
FIG. 4.

(a) One-dimensional mask pattern etched into Cr and layers. (b) Pattern in PMMA obtained using the mask in (a) in an ASFM exposure.

Image of FIG. 5.
FIG. 5.

(a) Two-dimensional array of through holes in a stack of films consisting of . (b) Array of diameter Cr dots obtained by using the mask in (a) in an ASFM exposure followed by a lift-off process.

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/content/avs/journal/jvstb/23/6/10.1116/1.2121735
2005-12-01
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Achromatic spatial frequency multiplication: A method for production of nanometer-scale periodic structures
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/6/10.1116/1.2121735
10.1116/1.2121735
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