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Iridium/silicon capping layer for soft x-ray and extreme ultraviolet mirrors
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10.1116/1.2122727
/content/avs/journal/jvstb/23/6/10.1116/1.2122727
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/6/10.1116/1.2122727
/content/avs/journal/jvstb/23/6/10.1116/1.2122727
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/content/avs/journal/jvstb/23/6/10.1116/1.2122727
2005-11-01
2014-07-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Iridium/silicon capping layer for soft x-ray and extreme ultraviolet mirrors
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/6/10.1116/1.2122727
10.1116/1.2122727
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