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Doppler writing and linewidth control for scanning beam interference lithography
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10.1116/1.2127938
/content/avs/journal/jvstb/23/6/10.1116/1.2127938
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/6/10.1116/1.2127938
/content/avs/journal/jvstb/23/6/10.1116/1.2127938
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/content/avs/journal/jvstb/23/6/10.1116/1.2127938
2005-12-01
2014-08-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Doppler writing and linewidth control for scanning beam interference lithography
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/6/10.1116/1.2127938
10.1116/1.2127938
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