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Proton and anion distribution and line edge roughness of chemically amplified electron beam resist
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10.1116/1.2131875
/content/avs/journal/jvstb/23/6/10.1116/1.2131875
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/6/10.1116/1.2131875
/content/avs/journal/jvstb/23/6/10.1116/1.2131875
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/content/avs/journal/jvstb/23/6/10.1116/1.2131875
2005-12-01
2014-11-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Proton and anion distribution and line edge roughness of chemically amplified electron beam resist
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/6/10.1116/1.2131875
10.1116/1.2131875
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