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Measuring line roughness through aerial image contrast variation using coherent extreme ultraviolet spatial filtering techniquesa)
a)No proof corrections received from author prior to publication.
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10.1116/1.2134717
/content/avs/journal/jvstb/23/6/10.1116/1.2134717
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/6/10.1116/1.2134717
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Dense lines and spaces in Shipley for the four highest contrast levels that printed. Resist thickness—.

Image of FIG. 2.
FIG. 2.

Dense lines and spaces in Shipley for the lowest four contrast levels that printed. Resist thickness—.

Image of FIG. 3.
FIG. 3.

Roughness seen in Shipley resist for dense lines as a function of contrast. Resist thickness—.

Image of FIG. 4.
FIG. 4.

Dense features printed in Shipley using the MET. Resist thickness—.

Image of FIG. 5.
FIG. 5.

Diffracted orders from a linear phase grating. For the lowest orders, light is only directed into the direction (modified image from Ref. 9).

Image of FIG. 6.
FIG. 6.

Simulations on contrast variation using an absorptive phase mask. As less light is allowed through the 0° and 90° phase levels, the image gains contrast.

Image of FIG. 7.
FIG. 7.

Multiple-contrast imaging using an absorptive phase mask. Four different transmission amounts are used for 0° and 90° phase levels. These transmission amounts produce different contrasts in the image field. Cutlines for each transmission amount are on the right.

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/content/avs/journal/jvstb/23/6/10.1116/1.2134717
2005-12-02
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Measuring line roughness through aerial image contrast variation using coherent extreme ultraviolet spatial filtering techniquesa)
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/6/10.1116/1.2134717
10.1116/1.2134717
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