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Measuring line roughness through aerial image contrast variation using coherent extreme ultraviolet spatial filtering techniquesa)
a)No proof corrections received from author prior to publication.
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10.1116/1.2134717
/content/avs/journal/jvstb/23/6/10.1116/1.2134717
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/6/10.1116/1.2134717
/content/avs/journal/jvstb/23/6/10.1116/1.2134717
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/content/avs/journal/jvstb/23/6/10.1116/1.2134717
2005-12-02
2014-08-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Measuring line roughness through aerial image contrast variation using coherent extreme ultraviolet spatial filtering techniquesa)
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/23/6/10.1116/1.2134717
10.1116/1.2134717
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