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Development of plasma-based implant for silicon devices
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10.1116/1.2101598
/content/avs/journal/jvstb/24/1/10.1116/1.2101598
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/1/10.1116/1.2101598
/content/avs/journal/jvstb/24/1/10.1116/1.2101598
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/content/avs/journal/jvstb/24/1/10.1116/1.2101598
2006-01-27
2014-07-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Development of plasma-based implant for silicon devices
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/1/10.1116/1.2101598
10.1116/1.2101598
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