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Modeling radiation-induced carbon contamination of extreme ultraviolet optics
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10.1116/1.2140005
/content/avs/journal/jvstb/24/1/10.1116/1.2140005
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/1/10.1116/1.2140005
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Figures

Image of FIG. 1.
FIG. 1.

Optical layout of the engineering test stand (ETS).

Image of FIG. 2.
FIG. 2.

Adsorption, diffusion, and dissociation of large parent hydrocarbons into a graphitic-like, but partially hydrogenated, layer by EUV radiation or secondary electrons.

Image of FIG. 3.
FIG. 3.

Overview of contamination model showing processes included in the hydrocarbon cracking module (left) and the hydrocarbon transport module (right).

Image of FIG. 4.
FIG. 4.

Various transport phenomena leading to a contamination layer.

Image of FIG. 5.
FIG. 5.

Cylindrical domain used for the surface diffusion calculation.

Image of FIG. 6.
FIG. 6.

Residual gas analysis (RGA) scans of (a) ALS experiment chamber with neoprene outgassing source, (b) contaminated ETS main chamber, and (c) typical uncontaminated ETS main chamber.

Image of FIG. 7.
FIG. 7.

Experimentally observed carbon film thickness for ALS experiments.

Image of FIG. 8.
FIG. 8.

Observed and predicted secondary electron yield as a function of carbon layer thickness.

Image of FIG. 9.
FIG. 9.

Calculated residence times for -alkane hydrocarbons at .

Image of FIG. 10.
FIG. 10.

Model prediction vs experimental data—excluding the effects of surface diffusion.

Image of FIG. 11.
FIG. 11.

Calculated (Ref. 33) surface diffusion coefficients for -alkane hydrocarbons on Au.

Image of FIG. 12.
FIG. 12.

Model prediction of pressure and dose dependence on carbon thickness for an exposure.

Image of FIG. 13.
FIG. 13.

Estimated carbon thickness for after an exposure at the specified pressure and intensity.

Image of FIG. 14.
FIG. 14.

Predicted carbon thickness as a function of molecular weight.

Image of FIG. 15.
FIG. 15.

Predicted radial profile of a carbon deposition spot with diffusion at ten times the nominal value for a -alkane.

Image of FIG. 16.
FIG. 16.

Predicted carbon thickness as a function of temperature for selected -alkanes at the conditions indicated.

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/content/avs/journal/jvstb/24/1/10.1116/1.2140005
2006-01-12
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Modeling radiation-induced carbon contamination of extreme ultraviolet optics
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/1/10.1116/1.2140005
10.1116/1.2140005
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