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Modeling oxidation of ruthenium optic coatings
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10.1116/1.2150225
/content/avs/journal/jvstb/24/1/10.1116/1.2150225
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/1/10.1116/1.2150225
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Simplified overview of the oxidation processes considered.

Image of FIG. 2.
FIG. 2.

Overview of the surface diffusion process showing the computational domain in cylindrical coordinates.

Image of FIG. 3.
FIG. 3.

Comparison of predicted oxide thickness for EUV-induced oxide growth and experimentally observed oxide thickness caused by electron-beam exposure on a ruthenium-capped optic over a 250 h exposure.

Image of FIG. 4.
FIG. 4.

Predicted oxide thickness for EUV-induced oxide growth on a ruthenium-capped optic for a 1 h exposure.

Image of FIG. 5.
FIG. 5.

Predicted oxygen concentration profiles within the Ru film for the specified conditions and exposure times.

Image of FIG. 6.
FIG. 6.

Predicted oxide thickness for a 100 h exposure as a function of EUV power, for several water pressures.

Image of FIG. 7.
FIG. 7.

Predicted oxide thickness for a 250 h exposure as a function of EUV power, for several water pressures.

Image of FIG. 8.
FIG. 8.

Predicted oxide thickness for a 100 h exposure as a function of water pressure.

Image of FIG. 9.
FIG. 9.

Predicted oxide thickness vs time for “the lithography set.”

Image of FIG. 10.
FIG. 10.

Predicted oxygen concentration profiles within the Ru film for “the lithography set” conditions.

Image of FIG. 11.
FIG. 11.

Predicted final oxide thickness vs temperature for the specified conditions.

Image of FIG. 12.
FIG. 12.

Predicted final surface oxygen concentration vs temperature for the specified conditions.

Image of FIG. 13.
FIG. 13.

Predicted final oxide thickness vs surface binding energy for the specified conditions.

Image of FIG. 14.
FIG. 14.

Predicted final surface oxygen concentration vs surface binding energy for the specified conditions.

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/content/avs/journal/jvstb/24/1/10.1116/1.2150225
2006-01-12
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Modeling extreme ultraviolet∕H2O oxidation of ruthenium optic coatings
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/1/10.1116/1.2150225
10.1116/1.2150225
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