1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Modeling oxidation of ruthenium optic coatings
Rent:
Rent this article for
USD
10.1116/1.2150225
/content/avs/journal/jvstb/24/1/10.1116/1.2150225
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/1/10.1116/1.2150225
/content/avs/journal/jvstb/24/1/10.1116/1.2150225
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/avs/journal/jvstb/24/1/10.1116/1.2150225
2006-01-12
2014-09-23
Loading

Full text loading...

This is a required field
Please enter a valid email address
This feature is disabled while Scitation upgrades its access control system.
This feature is disabled while Scitation upgrades its access control system.
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Modeling extreme ultraviolet∕H2O oxidation of ruthenium optic coatings
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/1/10.1116/1.2150225
10.1116/1.2150225
SEARCH_EXPAND_ITEM