Experimental setup for SKPM measurements.
Energy-band diagram between a heavily doped -type Si tip and an -type Si semiconductor.
(a) 2D SCM image and (b) 1D signal measured from the cross section of -step Si layers.
(a) 2D SKPM image and (b) 1D surface potential obtained from the cross section of -step Si layers.
One-dimensional dopant profiles of the -step Si structures obtained from SCM (dotted line) and SKPM (solid line).
Article metrics loading...
Full text loading...