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Fabrication of hybrid bilayer nanostructure by duo-mold imprinting
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View: Figures


Image of FIG. 1.
FIG. 1.

Schematic diagram of the fabrication of hybrid scaffold structure by duomold imprinting process. (a) First step: PMMA spin coated on mold 1 and liquid resin dispersed on mold 2 and a mold-to-mold imprinting is carried out at and for . (b) Second step: transfer of 3D structure from mold 2 to mold 1 by selective demolding from mold 2. (c) Third step: 3D structure remaining was transferred to a Si substrate via a second-step imprinting. (d) Hybrid scaffold structure was obtained after removal of residual layer by oxygen plasma etching.

Image of FIG. 2.
FIG. 2.

SEM images of a hybrid film consist of PMMA and PS with grating structures on both the top and bottom surfaces. (a) Cross-section view from front. (b) Cross-section view from side.

Image of FIG. 3.
FIG. 3.

SEM images of scaffold structures consist of PMMA and PS obtained after the oxygen plasma etching from the structure shown in Fig. 2. (a) Large area scaffold structure composed of PMMA and PS. (b) Zoom in view of the structure from the center.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication of hybrid bilayer nanostructure by duo-mold imprinting