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Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy secondary-ion-mass spectrometry
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10.1116/1.2167986
/content/avs/journal/jvstb/24/2/10.1116/1.2167986
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/2/10.1116/1.2167986
/content/avs/journal/jvstb/24/2/10.1116/1.2167986
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/content/avs/journal/jvstb/24/2/10.1116/1.2167986
2006-02-08
2014-11-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy O2+ secondary-ion-mass spectrometry
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/2/10.1116/1.2167986
10.1116/1.2167986
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