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Impact of supercritical drying on roughness of hydrogen silsesquioxane e-beam resist
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10.1116/1.2167990
/content/avs/journal/jvstb/24/2/10.1116/1.2167990
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/2/10.1116/1.2167990
/content/avs/journal/jvstb/24/2/10.1116/1.2167990
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/content/avs/journal/jvstb/24/2/10.1116/1.2167990
2006-02-08
2014-10-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Impact of supercritical CO2 drying on roughness of hydrogen silsesquioxane e-beam resist
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/2/10.1116/1.2167990
10.1116/1.2167990
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