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Polymer to polymer to polymer pattern transfer: Multiple molding for scale lithography
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10.1116/1.2184327
/content/avs/journal/jvstb/24/2/10.1116/1.2184327
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/2/10.1116/1.2184327
/content/avs/journal/jvstb/24/2/10.1116/1.2184327
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/content/avs/journal/jvstb/24/2/10.1116/1.2184327
2006-03-23
2014-10-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Polymer to polymer to polymer pattern transfer: Multiple molding for 100nm scale lithography
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/2/10.1116/1.2184327
10.1116/1.2184327
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