1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Polymer to polymer to polymer pattern transfer: Multiple molding for scale lithography
Rent:
Rent this article for
USD
10.1116/1.2184327
/content/avs/journal/jvstb/24/2/10.1116/1.2184327
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/2/10.1116/1.2184327
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Scheme of the multiple molding and the molecular structure of the mold resin.

Image of FIG. 2.
FIG. 2.

(a) period Si master, (b) PDMS element, (c) PDMS element after thermal curing, (d) SU-8 2050 mold, and (e) PEMMA final imprinted grating. In (b), the duty cycle measured on PDMS by AFM is significantly overestimated, likely due to distortions of the elastomeric features.

Image of FIG. 3.
FIG. 3.

(a) period InP master and final grating imprinted in PEMMA by NIL using the SU-8 mold (b).

Loading

Article metrics loading...

/content/avs/journal/jvstb/24/2/10.1116/1.2184327
2006-03-23
2014-04-19
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Polymer to polymer to polymer pattern transfer: Multiple molding for 100nm scale lithography
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/2/10.1116/1.2184327
10.1116/1.2184327
SEARCH_EXPAND_ITEM