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Investigation of thermophoretic protection with speed-controlled particles at 100, 50, and
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10.1116/1.2190660
/content/avs/journal/jvstb/24/3/10.1116/1.2190660
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/3/10.1116/1.2190660

Figures

Image of FIG. 1.
FIG. 1.

Schematic of the experimental chamber system.

Image of FIG. 2.
FIG. 2.

Schematic of the thermophoresis testing zone. The injection tube diameter is and the pinhole diameter is .

Image of FIG. 3.
FIG. 3.

Schematic of particle motion in the quiescent zone without temperature gradient (a) and with temperature gradient of (b). This schematic demonstrates particle behavior when their injection speed is close to the critical speed.

Image of FIG. 4.
FIG. 4.

Deposition results of 125 and PSL particles with particle injection speeds of 31 and for the gap distance under no temperature gradient and with temperature gradient at . The number of particles added for each case is shown next to the wafer maps.

Image of FIG. 5.
FIG. 5.

Deposition results of 125 and PSL particles with particle injection speeds of 31 and for the gap distance under no temperature gradient and with temperature gradient at . The number of particles added for each case is shown next to the wafer maps.

Image of FIG. 6.
FIG. 6.

Deposition results of 125 and PSL particles with particle injection speeds of 31 and for the gap distance under no temperature gradient and with temperature gradient at .

Image of FIG. 7.
FIG. 7.

Deposition results of PSL particles at 50 and with particle injection speeds of 16 and for the gap distance under no temperature gradient and with temperature gradient. The number of particles added for each case is shown next to the wafer maps.

Image of FIG. 8.
FIG. 8.

Deposition results of PSL particles at 50 and with particle injection speeds of 16 and for the gap distance under no temperature gradient and with temperature gradient. The number of particles added for each case is shown next to the wafer maps.

Tables

Generic image for table
TABLE I.

Particle characteristics used in this study.

Generic image for table
TABLE II.

Initial particle speed required to reach the critical surface for three gap distances after exiting the pinhole plate at 100, 50, and , based on the analytical model.

Generic image for table
TABLE III.

Summary of the thermophoresis test results.

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/content/avs/journal/jvstb/24/3/10.1116/1.2190660
2006-04-21
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Investigation of thermophoretic protection with speed-controlled particles at 100, 50, and 25mTorr
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/3/10.1116/1.2190660
10.1116/1.2190660
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