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Influence of hydrogen plasma surface treatment of Si substrate on nickel silicide formation
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10.1116/1.2200373
/content/avs/journal/jvstb/24/3/10.1116/1.2200373
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/3/10.1116/1.2200373
/content/avs/journal/jvstb/24/3/10.1116/1.2200373
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/content/avs/journal/jvstb/24/3/10.1116/1.2200373
2006-05-23
2014-10-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Influence of hydrogen plasma surface treatment of Si substrate on nickel silicide formation
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/3/10.1116/1.2200373
10.1116/1.2200373
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