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Role of reactive surface oxygen in causing enhanced copper ionization in a low- polymer
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10.1116/1.2201455
/content/avs/journal/jvstb/24/3/10.1116/1.2201455
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/3/10.1116/1.2201455

Figures

Image of FIG. 1.
FIG. 1.

Structure of SiLK-D™ showing aromatic rings and oxygen atoms in the structure.

Image of FIG. 2.
FIG. 2.

(a) BTS of as-deposited SiLK-D™ at and showing copper injection, (b) at and showing greater copper injection. The higher field pushes in more copper ions.

Image of FIG. 3.
FIG. 3.

(a) FTIR of as-deposited and plasma treated SiLK-D™ showing no change between the two, (b) XPS of as-deposited and plasma treated SiLK-D™ showing a sharp increase in the O peak at in plasma treated SiLK-D™ and (c) C core level peaks show a change in bonding between as-deposited and plasma treated SiLK-D™.

Image of FIG. 4.
FIG. 4.

(a) BTS of plasma treated SiLK-D™ at and showing more copper injection than as-deposited SiLK-D™ in Fig. 2(b) and (b) plasma treated SiLK-D™ showing a greater shift in flatband voltage than in (a). (c) BTS on plasma treated SiLK-D™ at and showing no shift in the flatband voltage indicating absence of injected copper ions.

Image of FIG. 5.
FIG. 5.

Shift in flatband voltages. The data for Pa-n are at and while SiLK-D™ was tested at and .

Tables

Generic image for table
TABLE I.

Plasma treatment conditions.

Generic image for table
TABLE II.

Thickness and refractive index (RI) measurements.

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/content/avs/journal/jvstb/24/3/10.1116/1.2201455
2006-05-12
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Role of reactive surface oxygen in causing enhanced copper ionization in a low-k polymer
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/3/10.1116/1.2201455
10.1116/1.2201455
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