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Smoothing of polycrystalline copper with rough surface by oblique argon-ion irradiation
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10.1116/1.2209987
/content/avs/journal/jvstb/24/4/10.1116/1.2209987
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/4/10.1116/1.2209987

Figures

Image of FIG. 1.
FIG. 1.

Schematic illustration of argon-ion irradiation apparatus.

Image of FIG. 2.
FIG. 2.

Surface morphologies after argon-ion irradiation with different incident angles at ion fluence of .

Image of FIG. 3.
FIG. 3.

Surface morphologies after argon-ion irradiation with different ion fluences at incident angle of 70°.

Image of FIG. 4.
FIG. 4.

Percentage of surface area more than vs incident angle at argon-ion fluence of .

Image of FIG. 5.
FIG. 5.

Percentage of surface area more than vs argon-ion fluence at incident angle of 70°.

Image of FIG. 6.
FIG. 6.

Cross sections before and after argon-ion irradiation with different incident angles at ion fluence of .

Image of FIG. 7.
FIG. 7.

Cross sections before and after argon-ion irradiation with different ion fluences at incident angle of 70°.

Tables

Generic image for table
TABLE I.

Average height, average number of grooves per , and root mean square of elevation for different incident angles and different ion fluences.

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/content/avs/journal/jvstb/24/4/10.1116/1.2209987
2006-07-11
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Smoothing of polycrystalline copper with rough surface by oblique argon-ion irradiation
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/4/10.1116/1.2209987
10.1116/1.2209987
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