No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The full text of this article is not currently available.
Interactive relationships between sidewall and bottom etch rates, as-affected by sidewall angle, during etching in a plasma
Data & Media loading...
Article metrics loading...
Full text loading...