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Improved Au Schottky contacts on GaAs using cryogenic metal deposition
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10.1116/1.2213270
/content/avs/journal/jvstb/24/4/10.1116/1.2213270
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/4/10.1116/1.2213270

Figures

Image of FIG. 1.
FIG. 1.

characteristics of Schottky diodes deposited at either (left) or (right). An expanded view of the forward voltage part of the curves is shown at the bottom.

Image of FIG. 2.
FIG. 2.

Forward current densities as a function of bias for diodes of different diameters deposited at either 77 or .

Image of FIG. 3.
FIG. 3.

Reverse current at for diodes deposited at either 77 or , as a function of either contact diameter (top) or area (bottom).

Image of FIG. 4.
FIG. 4.

Time dependence of forward bias at a current of for diodes deposited at either 77 or .

Image of FIG. 5.
FIG. 5.

Optical microscope images of Au contacts deposited at (left) or (right).

Image of FIG. 6.
FIG. 6.

XRR of thin Au layers of GaAs for the two different deposition temperatures and the associated Au surface roughness and interfacial roughness derived from the XRR.

Tables

Generic image for table
TABLE I.

Metals, melting temperature, and recrystallization temperature.

Generic image for table
TABLE II.

Summary of diode characteristics for deposition of the Au at either 77 or .

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/content/avs/journal/jvstb/24/4/10.1116/1.2213270
2006-06-29
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Improved Au Schottky contacts on GaAs using cryogenic metal deposition
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/4/10.1116/1.2213270
10.1116/1.2213270
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