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Absorbance measurement of polymers at extreme ultraviolet wavelength: Correlation between experimental and theoretical calculations
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10.1116/1.2214708
/content/avs/journal/jvstb/24/4/10.1116/1.2214708
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/4/10.1116/1.2214708

Figures

Image of FIG. 1.
FIG. 1.

Photoabsorption cross section of first and second row elements at .

Image of FIG. 2.
FIG. 2.

Reflectivity vs angle for the measurement of PMMA.

Image of FIG. 3.
FIG. 3.

Calculated and experimental linear absorption coefficients.

Tables

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TABLE I.

Selected polymer platforms, structure, and chemical characteristics.

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TABLE II.

Measured density and calculated absorption coefficients for resists platforms.

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TABLE III.

Calculated and measured absorbances for investigated polymer platforms.

Generic image for table
TABLE IV.

Calculated and measured density for the polymer platforms.

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/content/avs/journal/jvstb/24/4/10.1116/1.2214708
2006-06-30
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Absorbance measurement of polymers at extreme ultraviolet wavelength: Correlation between experimental and theoretical calculations
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/4/10.1116/1.2214708
10.1116/1.2214708
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