Absorbance measurement of polymers at extreme ultraviolet wavelength: Correlation between experimental and theoretical calculations
Photoabsorption cross section of first and second row elements at .
Reflectivity vs angle for the measurement of PMMA.
Calculated and experimental linear absorption coefficients.
Selected polymer platforms, structure, and chemical characteristics.
Measured density and calculated absorption coefficients for resists platforms.
Calculated and measured absorbances for investigated polymer platforms.
Calculated and measured density for the polymer platforms.
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