Micromechanical resonators and filters for microelectromechanical system applications
Schematic of a transverse filter (TF) type composed of identical cantilever beams coupled with a soft flexural beam, and a typical measurement circuit.
Schematic of a lateral filter (LF) composed of two identical clamped-clamped beams coupled with a V-shape coupling element, and a typical measurement circuit.
Schematic of a coupling element attached to the resonators and its equivalent network of impedances.
Flexural coupling beam with velocity and force as input and output and its equivalent transmission line model for .
(a) V-shape coupling element schematic, dimensions, and equivalent lumped model; (b) stiffness of V-shape coupling element vs ; and (c) vs and .
Equivalent electrical lumped circuit model of transverse filters (TF1–TF4).
Equivalent electrical lumped circuit model of lateral filters LF1 and LF2.
Simulation results for TF1–TF4 and LF1 and LF2 using HPADS.
SEM photo, simulation and experimental results for TF3.
SEM photo, simulation and experimental results for LF1.
SEM photo, simulation and experimental results for LF2.
Data analogy between mechanical and electrical elements.
Comparison between analytical lumped model and FEM simulation results for beam resonators.
Flexural coupling beam and V-shape lateral coupling element dimensions.
Equivalent electrical lumped parameters of filters.
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