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Micromechanical resonators and filters for microelectromechanical system applications
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10.1116/1.2356865
/content/avs/journal/jvstb/24/6/10.1116/1.2356865
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/6/10.1116/1.2356865

Figures

Image of FIG. 1.
FIG. 1.

Schematic of a transverse filter (TF) type composed of identical cantilever beams coupled with a soft flexural beam, and a typical measurement circuit.

Image of FIG. 2.
FIG. 2.

Schematic of a lateral filter (LF) composed of two identical clamped-clamped beams coupled with a V-shape coupling element, and a typical measurement circuit.

Image of FIG. 3.
FIG. 3.

Schematic of a coupling element attached to the resonators and its equivalent network of impedances.

Image of FIG. 4.
FIG. 4.

Flexural coupling beam with velocity and force as input and output and its equivalent transmission line model for .

Image of FIG. 5.
FIG. 5.

(a) V-shape coupling element schematic, dimensions, and equivalent lumped model; (b) stiffness of V-shape coupling element vs ; and (c) vs and .

Image of FIG. 6.
FIG. 6.

Equivalent electrical lumped circuit model of transverse filters (TF1–TF4).

Image of FIG. 7.
FIG. 7.

Equivalent electrical lumped circuit model of lateral filters LF1 and LF2.

Image of FIG. 8.
FIG. 8.

Simulation results for TF1–TF4 and LF1 and LF2 using HPADS.

Image of FIG. 9.
FIG. 9.

SEM photo, simulation and experimental results for TF3.

Image of FIG. 10.
FIG. 10.

SEM photo, simulation and experimental results for LF1.

Image of FIG. 11.
FIG. 11.

SEM photo, simulation and experimental results for LF2.

Tables

Generic image for table
TABLE I.

Data analogy between mechanical and electrical elements.

Generic image for table
TABLE II.

Comparison between analytical lumped model and FEM simulation results for beam resonators.

Generic image for table
TABLE III.

Flexural coupling beam and V-shape lateral coupling element dimensions.

Generic image for table
TABLE IV.

Equivalent electrical lumped parameters of filters.

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/content/avs/journal/jvstb/24/6/10.1116/1.2356865
2006-10-30
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Micromechanical resonators and filters for microelectromechanical system applications
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/6/10.1116/1.2356865
10.1116/1.2356865
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