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Reversing the hydrogen silsesquioxane image by silicon nitride and silicon oxide chemical mechanical polishing
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10.1116/1.2357969
/content/avs/journal/jvstb/24/6/10.1116/1.2357969
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/6/10.1116/1.2357969
/content/avs/journal/jvstb/24/6/10.1116/1.2357969
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/content/avs/journal/jvstb/24/6/10.1116/1.2357969
2006-12-04
2014-10-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Reversing the hydrogen silsesquioxane image by silicon nitride and silicon oxide chemical mechanical polishing
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/6/10.1116/1.2357969
10.1116/1.2357969
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