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Direct-write electron-beam lithography of an IR antenna-coupled microbolometer onto the surface of a hemispherical lens
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10.1116/1.2360978
/content/avs/journal/jvstb/24/6/10.1116/1.2360978
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/6/10.1116/1.2360978
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Image of the spinner holder for the hemispherical lens. (b) Drawing of spinner holder for the hemispherical lens.

Image of FIG. 2.
FIG. 2.

(a) Image of the hot-plate holder for the hemispherical lens. (b) Drawing of the hot-plate holder for the hemispherical lens.

Image of FIG. 3.
FIG. 3.

Image of the hemispherical lens and SEM fixture.

Image of FIG. 4.
FIG. 4.

Image of the hemispherical lens and evaporator holder.

Image of FIG. 5.
FIG. 5.

SEM Image of the finished antenna-coupled microbolometer at the center of the lens.

Image of FIG. 6.
FIG. 6.

Image of the hemispherical lens mounted on a chip carrier for (a) substrate-side illumination and (b) air-side illumination.

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/content/avs/journal/jvstb/24/6/10.1116/1.2360978
2006-10-31
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Direct-write electron-beam lithography of an IR antenna-coupled microbolometer onto the surface of a hemispherical lens
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/6/10.1116/1.2360978
10.1116/1.2360978
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