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Effect of the addition of argon to reactive nitrogen gas on field emission properties of amorphous carbon nitride films
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10.1116/1.2360980
/content/avs/journal/jvstb/24/6/10.1116/1.2360980
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/6/10.1116/1.2360980

Figures

Image of FIG. 1.
FIG. 1.

PL spectra of film deposited at different gas flow ratios.

Image of FIG. 2.
FIG. 2.

(a) XPS N spectra of film deposited at different gas flow ratios. (b) Variation of relative peak area of C–N bonds with the gas flow ratio.

Image of FIG. 3.
FIG. 3.

(a) XPS C spectra of film deposited at different gas flow ratios. (b) Variation of relative peak area of C–C bonds and the relative intensity ratio of and C–N bonds with the gas flow ratio.

Image of FIG. 4.
FIG. 4.

(a) Raman spectra of film deposited at different gas flow ratios. (b) Dependence of the band position and of the Raman spectra on the gas flow ratio.

Image of FIG. 5.
FIG. 5.

AFM surface morphology of film at different gas flow ratios. (a) Pure , (b) 1:1, (c), 1:2, and (d) 1:5.

Image of FIG. 6.
FIG. 6.

(a) Field emission curves and (b) corresponding FN plots of films before and after the addition of Ar.

Tables

Generic image for table
TABLE I.

C, N, and O content of films deposited at different gas flow ratios measured by XPS.

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/content/avs/journal/jvstb/24/6/10.1116/1.2360980
2006-10-31
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of the addition of argon to reactive nitrogen gas on field emission properties of amorphous carbon nitride films
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/6/10.1116/1.2360980
10.1116/1.2360980
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