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Reverse transfer of nanostencil patterns using intermediate sacrificial layer and lift-off process
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10.1116/1.2366610
/content/avs/journal/jvstb/24/6/10.1116/1.2366610
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/6/10.1116/1.2366610
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic representation of the stencil lithography process.

Image of FIG. 2.
FIG. 2.

Formation of a nanowire pattern connecting two large pads (nanobridge) by the normal nanostencil lithography. The narrow slit connecting two large openings in the stencil is composed of two freestanding cantilevers.

Image of FIG. 3.
FIG. 3.

Reverse nanostencil lithography process. (a) Growth of -thick thermal on the Si substrate. (b) Evaporation of -thick Cr onto the substrate through the stencil. (c) Formation of the primary Cr pattern on the layer. (d) Dry and wet etching of the layer using the Cr pattern as an etch mask. (e) Secondary deposition of -thick Cr on the entire substrate. (f) Formation of the reversed Cr pattern by lift-off in a BHF solution.

Image of FIG. 4.
FIG. 4.

Evolution of the pattern structure during the reversing process: (a) after dry etching of the layer, (b) after the additional wet etching, and (c) after the deposition of the second Cr.

Image of FIG. 5.
FIG. 5.

Reversing behavior of a Cr stencil pattern. (a) The primary Cr pattern on the layer formed by the stencil deposition and (b) the reversed Cr pattern on Si.

Image of FIG. 6.
FIG. 6.

Various types of the Cr pattern on Si formed by the reverse nanostencil process.

Image of FIG. 7.
FIG. 7.

SEM images of (a) the nanobridge structure in a SiN stencil and (b) the Cr pattern obtained from it by the reverse nanostencil process. The beneficial effect of pattern blurring is schematically shown in (c). Due to the pattern blurring during the stencil deposition, the final Cr bridge pattern is narrower than the original SiN bridge in the stencil.

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/content/avs/journal/jvstb/24/6/10.1116/1.2366610
2006-11-30
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Reverse transfer of nanostencil patterns using intermediate sacrificial layer and lift-off process
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/6/10.1116/1.2366610
10.1116/1.2366610
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