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Exposure dose effects on the reaction-diffusion process in model extreme ultraviolet photoresists
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10.1116/1.2375086
/content/avs/journal/jvstb/24/6/10.1116/1.2375086
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/6/10.1116/1.2375086
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Reflectivity profiles for polymer-polymer bilayers exposed to broadband radiation for the exposure doses listed. PEB was carried out at for . (Inset) as a function of depth for the doses indicated. Reflectivities are offset for clarity.

Image of FIG. 2.
FIG. 2.

Deprotection profiles determined from fits to neutron reflectivity data for polymer-polymer bilayer samples exposed to broadband radiation for the exposure doses listed. PEB was carried out at for . (Inset) Diffusion lengths for long-range and short-range diffusion fronts as a function of exposure dose at .

Image of FIG. 3.
FIG. 3.

Diffusion coefficients for the reaction-diffusion fronts, both long-range (a) and short range (b), as a function of exposure dose at .

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/content/avs/journal/jvstb/24/6/10.1116/1.2375086
2006-11-30
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Exposure dose effects on the reaction-diffusion process in model extreme ultraviolet photoresists
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/6/10.1116/1.2375086
10.1116/1.2375086
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