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Effects of Zn content on structural and transparent conducting properties of indium-zinc oxide films grown by rf magnetron sputtering
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10.1116/1.2393246
/content/avs/journal/jvstb/24/6/10.1116/1.2393246
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/6/10.1116/1.2393246
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Zn content in IZO films grown at room temperature and as a function of Zn content in the targets.

Image of FIG. 2.
FIG. 2.

(a) X-ray diffraction patterns for different Zn contents (, ) in IZO films grown (a) at room temperature and (b) .

Image of FIG. 3.
FIG. 3.

Layer spacing of the films as a function of Zn content in IZO films grown at room temperature and .

Image of FIG. 4.
FIG. 4.

(a) Mobility, (b) carrier concentration, and (c) conductivity as a function of Zn content for IZO films grown at room temperature and .

Image of FIG. 5.
FIG. 5.

Optical transmittance spectra of IZO films grown at and the insert is the calculated optical band gap energy of the films as a function of Zn content (, ).

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/content/avs/journal/jvstb/24/6/10.1116/1.2393246
2006-11-22
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effects of Zn content on structural and transparent conducting properties of indium-zinc oxide films grown by rf magnetron sputtering
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/24/6/10.1116/1.2393246
10.1116/1.2393246
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