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Mesa structures of GaAs fabricated by nanoparticle mask under gas-cluster ion-beam irradiation
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10.1116/1.2402149
/content/avs/journal/jvstb/25/1/10.1116/1.2402149
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/1/10.1116/1.2402149
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagram of the microfabrication process.

Image of FIG. 2.
FIG. 2.

(a) AFM image of native GaAs. (b) Height profile obtained from the structure shown in (a).

Image of FIG. 3.
FIG. 3.

(a) AFM image of a group of cylindrical structures obtained using Cu particles ( in diameter). (b) Height profile obtained from the structure shown in (a).

Image of FIG. 4.
FIG. 4.

AFM image of GaAs surface obtained using particles ( in diameter). (b) Height profile obtained from the structure shown in (a).

Image of FIG. 5.
FIG. 5.

Relationships between mask diameter and (a) lateral size of nanostructures or (b) average roughness obtained in area containing the nanostructures on the GaAs surface.

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/content/avs/journal/jvstb/25/1/10.1116/1.2402149
2007-01-31
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Mesa structures of GaAs fabricated by nanoparticle mask under gas-cluster ion-beam irradiation
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/1/10.1116/1.2402149
10.1116/1.2402149
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