PSF: (a) energy distribution as predicted by DMC4-Gaussian (points), four Gaussian point spread function fitted to DMC and independent experimental PSF (MIT) (normalized); (b) zoom-in comparison between the raw DMC data with the experimental (and independent) PSF. Notice the excellent agreement between model and experiment.
Relative intensity along the central line of a resonator (400 linewidth, and gap between the bus and ring).
E-beam writing of rings: (a) multiple-polygon method with 360 polygons; (b) single-pixel writing. Notice the smoothness of the second case.
Edge detection and fitting: (a) line; (b) ring.
Experimental CD variation at the dose of : (a) along the bus of the -gap resonator; (b) along the pure bus. Average of nine images.
Correlation length from height-to-height correlation function: (a) pure line; (b) resonator bus.
Local LER for (a) the next-to-ring bus edge of -gap resonator; (b) pure line. The black line is for a local LER computed with a window of and the gray with . Notice how no structure is observed in (b) relative to (a).
Propagation loss as a function of roughness and correlation length; estimation with the determined LER and correlation length.
Gaussian fit to the PSF CMIT stack.
Results of LER analysis: refers to the standard deviation of each term (see text), while is the correlation length.
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