Schematic fabrication process sequence for bilayer thin film silicon electrostatic resonators [(bridges (left) and cantilevers (right))] on a glass substrate using Unity 4011 as a sacrificial layer.
SEM micrograph of thin film silicon bridge (with , , and ) on a glass substrate using Unity 4011 as a sacrificial layer.
Deflection of the microbridge at frequency as a function of ac actuation voltage with frequency . The dotted line in the figure is a nonlinear fit to the data points with dependence.
Resonance frequency spectrum for a microbridge using Unity 4011 as a sacrificial layer.
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