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Deposition of zinc oxide layers by high-power impulse magnetron sputtering
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10.1116/1.2735968
/content/avs/journal/jvstb/25/3/10.1116/1.2735968
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/3/10.1116/1.2735968
/content/avs/journal/jvstb/25/3/10.1116/1.2735968
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/content/avs/journal/jvstb/25/3/10.1116/1.2735968
2007-05-08
2014-12-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Deposition of zinc oxide layers by high-power impulse magnetron sputtering
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/3/10.1116/1.2735968
10.1116/1.2735968
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