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Ordered silicon nanostructures by ion beam induced glancing angle deposition
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10.1116/1.2737436
/content/avs/journal/jvstb/25/3/10.1116/1.2737436
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/3/10.1116/1.2737436
/content/avs/journal/jvstb/25/3/10.1116/1.2737436
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/content/avs/journal/jvstb/25/3/10.1116/1.2737436
2007-05-08
2014-08-27
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ordered silicon nanostructures by ion beam induced glancing angle deposition
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/3/10.1116/1.2737436
10.1116/1.2737436
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