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Proton exchange and diffusion in using inductance coupled high density plasma
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10.1116/1.2746052
/content/avs/journal/jvstb/25/4/10.1116/1.2746052
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/4/10.1116/1.2746052
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

SRIM/TRIM software was used to calculate proton distribution after bombardment of ICP protons with a typical kinetic energy and implantation effect in substrates.

Image of FIG. 2.
FIG. 2.

Schematic configuration of inductance coupled plasma (ICP) for PE processing experiments.

Image of FIG. 3.
FIG. 3.

Both dc self-bias voltage curves plotted at the same RIE power of and ICP power of : a lower curve was believed to have more negative ions.

Image of FIG. 4.
FIG. 4.

SIMS profiles as a result of different PE processes and shadowing for PE layers. -cut treated by (a) RIE power of , ICP power of , and at pressure of for at ; (b) RIE power of , ICP power of , and at pressure of for at ; and (c) RIE power of , ICP power of , and at pressure of for at .

Image of FIG. 5.
FIG. 5.

Proton-exchanged depths and dc self-bias voltages with working pressures changed and constant RIE power of and ICP power of for at .

Image of FIG. 6.
FIG. 6.

Proton-exchanged depths and dc self-bias voltages with ICP powers changed and fixed rf bias power of and working pressure of for at .

Image of FIG. 7.
FIG. 7.

Proton-exchanged depths and dc self-bias voltages with RIE powers changed and fixed ICP power of and pressure of for at .

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/content/avs/journal/jvstb/25/4/10.1116/1.2746052
2007-06-12
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Proton exchange and diffusion in LiNbO3 using inductance coupled high density plasma
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/4/10.1116/1.2746052
10.1116/1.2746052
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