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Fabrication of complementary metal-oxide-semiconductor compatible semiconducting yttrium barium copper oxide uncooled infrared microbolometer arrays
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10.1116/1.2756551
/content/avs/journal/jvstb/25/4/10.1116/1.2756551
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/4/10.1116/1.2756551
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Cross-sectional view of a YBCO microbolometer. CoventorWare® model of the micromachined microbolometers showing (b) the -long electrode arm geometry for the frame rate and (c) the -long electrode arm geometry for the frame rate.

Image of FIG. 2.
FIG. 2.

(a) Fabrication started with the CMOS readout die bonded to silicon carrier wafer. (b) Aluminum deposition. Shown in a CoventorWare® schematic, a single microbolometer pixel, and a array. (c) Sacrificial polyimide PI2737 coating and patterning for frame rate shown for the same series of photos. (d) Titanium deposition and patterning to form the -long electrode arms with the same series of photos.

Image of FIG. 3.
FIG. 3.

Microbolometer fabrication continued using a Coventorware® schematic, image of a single microbolometer pixel, and a array. (a) Gold contact deposition and patterning. (b) YBCO thermometer deposition and patterning. (c) Sacrificial polyimide ashing to complete the microbolometer fabrication process.

Image of FIG. 4.
FIG. 4.

SEM micrograph of a portion of a microbolometer array with a CTIA readout circuit.

Image of FIG. 5.
FIG. 5.

Current-voltage characteristic of (a) two NMOS transistors and (b) two PMOS transistors before and after microbolometer fabrication showing vs characteristics.

Image of FIG. 6.
FIG. 6.

dc transfer characteristic showing the output voltage vs input voltage for (a) the CTIA amplifier and (b) the CCBDI amplifier measured before and after microbolometer fabrication.

Image of FIG. 7.
FIG. 7.

(a) Resistance and TCR vs temperature and (b) Arrhenius plot showing natural logarithm of microbolometer resistance vs .

Image of FIG. 8.
FIG. 8.

characteristic of four YBCO microbolometers for a -long electrode arm geometry.

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/content/avs/journal/jvstb/25/4/10.1116/1.2756551
2007-07-26
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication of complementary metal-oxide-semiconductor compatible semiconducting yttrium barium copper oxide uncooled infrared microbolometer arrays
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/4/10.1116/1.2756551
10.1116/1.2756551
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