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Optical improvement of photonic devices fabricated by focused ion beam micromachining
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10.1116/1.2770741
/content/avs/journal/jvstb/25/5/10.1116/1.2770741
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/5/10.1116/1.2770741

Figures

Image of FIG. 1.
FIG. 1.

12-fold PQC model (a1), 12-fold PQC slab waveguide model (a2), and the calculated transmission spectra of (a1) and (a2) by means of the 3D FDTD method.

Image of FIG. 2.
FIG. 2.

Nanofabrication scheme of the tapered ridge waveguides (R1) and (R2) and the 12-fold PQC slab waveguides (P1)–(P4) with FIB machine.

Image of FIG. 3.
FIG. 3.

SEM pictures of a 12-fold PQC slab waveguide fabricated by the FIB technique before (a) and after (b) post-FIB treatment procedure (denoted by sample PQCW3).

Image of FIG. 4.
FIG. 4.

Detected light intensities at the outlet of the tapered ridge waveguide at before (a) and after (b) the low temperature liquid annealing.

Image of FIG. 5.
FIG. 5.

SEM pictures of the air-bridged samples of PQCW1 (a), PQCW2 (b), and PQCW3 (c).

Image of FIG. 6.
FIG. 6.

Measured (a) and simulated (b) transmission spectra of 12-fold PQC slab waveguides fabricated by FIB technique with three different post-FIB treatments.

Tables

Generic image for table
TABLE I.

Five samples with three different disposal steps.

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/content/avs/journal/jvstb/25/5/10.1116/1.2770741
2007-08-24
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Optical improvement of photonic devices fabricated by Ga+ focused ion beam micromachining
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/5/10.1116/1.2770741
10.1116/1.2770741
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