Optical improvement of photonic devices fabricated by focused ion beam micromachining
12-fold PQC model (a1), 12-fold PQC slab waveguide model (a2), and the calculated transmission spectra of (a1) and (a2) by means of the 3D FDTD method.
Nanofabrication scheme of the tapered ridge waveguides (R1) and (R2) and the 12-fold PQC slab waveguides (P1)–(P4) with FIB machine.
SEM pictures of a 12-fold PQC slab waveguide fabricated by the FIB technique before (a) and after (b) post-FIB treatment procedure (denoted by sample PQCW3).
Detected light intensities at the outlet of the tapered ridge waveguide at before (a) and after (b) the low temperature liquid annealing.
SEM pictures of the air-bridged samples of PQCW1 (a), PQCW2 (b), and PQCW3 (c).
Measured (a) and simulated (b) transmission spectra of 12-fold PQC slab waveguides fabricated by FIB technique with three different post-FIB treatments.
Five samples with three different disposal steps.
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