Transport behavior of atomic layer deposition precursors through polymer masking layers: Influence on area selective atomic layer deposition
Schematic of the QCM sorption/desorption apparatus used in this work.
Chemical structure of polymers investigated in this study.
Schematic of the 1D geometry used in this study.
Van’t Hoff plots for water sorption in PMMA (a), PHOST (b), and HFA-PNB (c) films using a water vapor pressure of .
Sorption curve for titanium isopropoxide in PMMA at . , film .
Van’t Hoff plot for titanium isopropoxide sorption in PMMA.
Diffusion coefficient of titanium isopropoxide in PMMA at different temperatures.
Sorption kinetics of in PMMA at . , Film .
Estimation of diffusion coefficient of in PMMA at using the initial portion of the sorption curve.
Estimated heat of sorption of water in PHOST, HFA-PNB, and PMMA.
Estimated solubility of water vapor in PHOST, HFA-PNB, and PMMA under different experimental conditions.
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