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Transport behavior of atomic layer deposition precursors through polymer masking layers: Influence on area selective atomic layer deposition
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10.1116/1.2782546
/content/avs/journal/jvstb/25/5/10.1116/1.2782546
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/5/10.1116/1.2782546

Figures

Image of FIG. 1.
FIG. 1.

Schematic of the QCM sorption/desorption apparatus used in this work.

Image of FIG. 2.
FIG. 2.

Chemical structure of polymers investigated in this study.

Image of FIG. 3.
FIG. 3.

Schematic of the 1D geometry used in this study.

Image of FIG. 4.
FIG. 4.

Van’t Hoff plots for water sorption in PMMA (a), PHOST (b), and HFA-PNB (c) films using a water vapor pressure of .

Image of FIG. 5.
FIG. 5.

Sorption curve for titanium isopropoxide in PMMA at . , film .

Image of FIG. 6.
FIG. 6.

Van’t Hoff plot for titanium isopropoxide sorption in PMMA.

Image of FIG. 7.
FIG. 7.

Diffusion coefficient of titanium isopropoxide in PMMA at different temperatures.

Image of FIG. 8.
FIG. 8.

Sorption kinetics of in PMMA at . , Film .

Image of FIG. 9.
FIG. 9.

Estimation of diffusion coefficient of in PMMA at using the initial portion of the sorption curve.

Tables

Generic image for table
TABLE I.

Estimated heat of sorption of water in PHOST, HFA-PNB, and PMMA.

Generic image for table
TABLE II.

Estimated solubility of water vapor in PHOST, HFA-PNB, and PMMA under different experimental conditions.

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/content/avs/journal/jvstb/25/5/10.1116/1.2782546
2007-09-21
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Transport behavior of atomic layer deposition precursors through polymer masking layers: Influence on area selective atomic layer deposition
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/5/10.1116/1.2782546
10.1116/1.2782546
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