Measurements of acid generation by extreme ultraviolet irradiation in lithographic films
Formation of from various PAGs in a PMeOSt matrix as a function of EUV dose. The inset shows the change of the C6 visible spectrum upon protonation.
Formation of from various PAGs in (a) a MADMA-NORLAC and (b) an ESCAP matrix as a function of EUV dose.
TXRF surface analyses of PMeOSt and ESCAP films containing PAGs. Shown are the relative amounts of PAGs (sulfur was tagging atom) as a function of the fluorine content of the PAG.
(a) Dependency of formation under EUV irradiation from the amount of fluorine in the PAG for PMeOSt, ESCAP, and MADMA-NORLAC. (b) formation under saturating DUV conditions as a function of the fluorine content of the PAG.
formation as a function of EUV dose from a PAG blended with PMMA, compared with a structurally analogous PAG copolymerized with PMMA.
EUV dose to clear experiments of (a) MADMA-NORLAC and (b) ESCAP films. PAG load for ESCAP was about 1.3 times higher than for MADMA-NORLAC. All PAGs were in equimolar amounts for each polymer and were in a 1:0.05 molar ratio to TMAH.
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