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Measurements of acid generation by extreme ultraviolet irradiation in lithographic films
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10.1116/1.2779045
/content/avs/journal/jvstb/25/6/10.1116/1.2779045
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/6/10.1116/1.2779045
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Formation of from various PAGs in a PMeOSt matrix as a function of EUV dose. The inset shows the change of the C6 visible spectrum upon protonation.

Image of FIG. 2.
FIG. 2.

Formation of from various PAGs in (a) a MADMA-NORLAC and (b) an ESCAP matrix as a function of EUV dose.

Image of FIG. 3.
FIG. 3.

TXRF surface analyses of PMeOSt and ESCAP films containing PAGs. Shown are the relative amounts of PAGs (sulfur was tagging atom) as a function of the fluorine content of the PAG.

Image of FIG. 4.
FIG. 4.

(a) Dependency of formation under EUV irradiation from the amount of fluorine in the PAG for PMeOSt, ESCAP, and MADMA-NORLAC. (b) formation under saturating DUV conditions as a function of the fluorine content of the PAG.

Image of FIG. 5.
FIG. 5.

formation as a function of EUV dose from a PAG blended with PMMA, compared with a structurally analogous PAG copolymerized with PMMA.

Image of FIG. 6.
FIG. 6.

EUV dose to clear experiments of (a) MADMA-NORLAC and (b) ESCAP films. PAG load for ESCAP was about 1.3 times higher than for MADMA-NORLAC. All PAGs were in equimolar amounts for each polymer and were in a 1:0.05 molar ratio to TMAH.

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/content/avs/journal/jvstb/25/6/10.1116/1.2779045
2007-12-11
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Measurements of acid generation by extreme ultraviolet irradiation in lithographic films
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/6/10.1116/1.2779045
10.1116/1.2779045
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