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Multilayer phase-only diffraction gratings: Fabrication and application to extreme ultraviolet optics
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10.1116/1.2798725
/content/avs/journal/jvstb/25/6/10.1116/1.2798725
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/6/10.1116/1.2798725
/content/avs/journal/jvstb/25/6/10.1116/1.2798725
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/content/avs/journal/jvstb/25/6/10.1116/1.2798725
2007-12-06
2014-09-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Multilayer phase-only diffraction gratings: Fabrication and application to extreme ultraviolet optics
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/6/10.1116/1.2798725
10.1116/1.2798725
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