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Evaluation of surface roughness of Zerodur® substrates machined by ion beam with energy of
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10.1116/1.2800333
/content/avs/journal/jvstb/25/6/10.1116/1.2800333
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/6/10.1116/1.2800333
/content/avs/journal/jvstb/25/6/10.1116/1.2800333
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/content/avs/journal/jvstb/25/6/10.1116/1.2800333
2007-12-07
2014-09-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Evaluation of surface roughness of Zerodur® substrates machined by Ar+ ion beam with energy of 3–10keV
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/6/10.1116/1.2800333
10.1116/1.2800333
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