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Evaluation of surface roughness of Zerodur® substrates machined by ion beam with energy of
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10.1116/1.2800333
/content/avs/journal/jvstb/25/6/10.1116/1.2800333
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/6/10.1116/1.2800333
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagram of ion beam machining apparatus used in the experiment.

Image of FIG. 2.
FIG. 2.

(a-1) Image of the shape of the surface machined without an electron beam neutralizer and measured by a scanning white light interferometer. (a-2) profile of the surface. (b-1) The surface machined after grounding its positive charge. (b-2) profile of the surface.

Image of FIG. 3.
FIG. 3.

(a) MSFR of the unprocessed surface of Zerodur® measured by a scanning white light interferometer. (b) The surface machined up to a depth of using an ion beam having an energy of .

Image of FIG. 4.
FIG. 4.

MSFR of the Zerodur® substrate as a function of the ion beam machining depth.

Image of FIG. 5.
FIG. 5.

AFM images of (a) unprocessed surface and [(b)–(e)] surface machined with an ion beam having an energy of . The machined depth is (b) , (c) , (d) , and (e) .

Image of FIG. 6.
FIG. 6.

(a) AFM image of the unprocessed surface. AFM image of the surface machined with an ion beam having an energy of (b) , (c) , and (d) . Each surface was machined up to a shallow depth of .

Image of FIG. 7.
FIG. 7.

(a) AFM image of the unprocessed surface. AFM image of the surface machined with an ion beam having an energy of (b) , (c) , (d) , and (e) . Each surface was machined up to a depth of .

Image of FIG. 8.
FIG. 8.

(a) HSFR as a function of the machined depth for each energy level. (b) The average HSFR of the surface machined above a depth of as a function of the energy of the ion beam.

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/content/avs/journal/jvstb/25/6/10.1116/1.2800333
2007-12-07
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Evaluation of surface roughness of Zerodur® substrates machined by Ar+ ion beam with energy of 3–10keV
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/6/10.1116/1.2800333
10.1116/1.2800333
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