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Graphoepitaxial cylindrical block copolymer nanodomains evaluated as bit patterned media template
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10.1116/1.2801860
/content/avs/journal/jvstb/25/6/10.1116/1.2801860
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/6/10.1116/1.2801860
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

SEM images of cylindrical PS--PMMA domain structures with (a) multiple grains and a size distribution of and (b) single grain and a size distribution of .

Image of FIG. 2.
FIG. 2.

Block copolymer domains confined in a trench: (a) SEM images of 7, 8, 11, and 13 rows (from left to right) of perpendicularly oriented cylindrical domains aligned along the trench sidewall and (b) domain size sigma and spacing sigma as a function of the number of rows in the trench.

Image of FIG. 3.
FIG. 3.

Direction-dependent domain size variation: (a) well-aligned block copolymer domains in a trench and (b) size variation in both along-axis and across-axis directions.

Image of FIG. 4.
FIG. 4.

Block copolymer domains aligned in preferential trenches without surface neutralization: (a) seven rows of PS--PMMA domains with spacing and (b) 17 rows of PS--PMMA domains with spacing.

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/content/avs/journal/jvstb/25/6/10.1116/1.2801860
2007-12-06
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Graphoepitaxial cylindrical block copolymer nanodomains evaluated as bit patterned media template
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/6/10.1116/1.2801860
10.1116/1.2801860
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