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Nanoscale patterning in high resolution HSQ photoresist by interferometric lithography with tabletop extreme ultraviolet lasers
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10.1116/1.2801870
/content/avs/journal/jvstb/25/6/10.1116/1.2801870
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/6/10.1116/1.2801870
/content/avs/journal/jvstb/25/6/10.1116/1.2801870
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/content/avs/journal/jvstb/25/6/10.1116/1.2801870
2007-12-07
2014-12-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nanoscale patterning in high resolution HSQ photoresist by interferometric lithography with tabletop extreme ultraviolet lasers
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/6/10.1116/1.2801870
10.1116/1.2801870
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