Novel magnetic microstigmator for electron beam astigmatism correction in the electron beam microcolumn system
Proposed magnetic microstigmator: (a) schematic and (b) top view.
Operational principle of the proposed magnetic microstigmator: (a) the electron beam pulled toward the magnetic pole element and (b) the astigmatism corrected by the quadrupole magnetic field within the central bore area.
(a) 3D model of the proposed magnetic microstigmator and (b) vector plot of the field at the plane within the central bore area of the microstigmator .
Schematic diagram of the fabrication steps for the designed magnetic microstigmator.
Microphotographs of the fabricated magnetic microstigmator.
Electron beam microcolumn system (EBMCS): (a) schematic diagram and (b) microphotograph of EBMCS assembled with the fabricated magnetic microstigmator.
Phosphor screen image of the electron beam probe: (a) no driving current applied, (b) driving current applied to pairs 1 and 3, (c) pairs 2 and 4, and (d) all the four pairs of the microinductors.
Current images of the copper grid specimen with the driving current varying from .
Deviation angle of the copper grid image vs driving current applied to the magnetic microstigmator with a bore diameter of .
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