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Fabrication of high aspect ratio Si nanogratings with smooth sidewalls for a deep UV-blocking particle filter
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10.1116/1.2804612
/content/avs/journal/jvstb/25/6/10.1116/1.2804612
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/6/10.1116/1.2804612
/content/avs/journal/jvstb/25/6/10.1116/1.2804612
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/content/avs/journal/jvstb/25/6/10.1116/1.2804612
2007-12-11
2014-11-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication of high aspect ratio Si nanogratings with smooth sidewalls for a deep UV-blocking particle filter
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/25/6/10.1116/1.2804612
10.1116/1.2804612
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