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Level set modeling of the orientation dependence of solid phase epitaxial regrowth
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View: Figures


Image of FIG. 1.
FIG. 1.

Surface angle is measured from the ⟨100⟩ direction.

Image of FIG. 2.
FIG. 2.

Data for regrowth velocity and the fifth order polynomial fit vs surface angle.

Image of FIG. 3.
FIG. 3.

Regrowth without orientation dependence. The curve represents amorphous-crystalline interface with region below the curve being amorphous. Different curves represent the position of interface at different times.

Image of FIG. 4.
FIG. 4.

(a) Cross-sectional transmission electron microscopy image of a partially regrown amorphous-crystalline interface. (b) Simulation of interface (with orientation dependence). The region below the curve is crystalline and above is amorphous. Different curves represent different time points.

Image of FIG. 5.
FIG. 5.

[(a) and (b)] Simulations of regrowth using level set method for different points in time. (b) is for the smallest time followed by (a) and (b).

Image of FIG. 6.
FIG. 6.

[(a) and (b)] Simulations of regrowth with wider trenches (each contour represents different time instants).

Image of FIG. 7.
FIG. 7.

Simulations placed on top of TEM images (axis and scale matched). (a) shows regrowth without stress while (b) is a compressive stress case.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Level set modeling of the orientation dependence of solid phase epitaxial regrowth