Surface angle is measured from the ⟨100⟩ direction.
Data for regrowth velocity and the fifth order polynomial fit vs surface angle.
Regrowth without orientation dependence. The curve represents amorphous-crystalline interface with region below the curve being amorphous. Different curves represent the position of interface at different times.
(a) Cross-sectional transmission electron microscopy image of a partially regrown amorphous-crystalline interface. (b) Simulation of interface (with orientation dependence). The region below the curve is crystalline and above is amorphous. Different curves represent different time points.
[(a) and (b)] Simulations of regrowth using level set method for different points in time. (b) is for the smallest time followed by (a) and (b).
[(a) and (b)] Simulations of regrowth with wider trenches (each contour represents different time instants).
Simulations placed on top of TEM images (axis and scale matched). (a) shows regrowth without stress while (b) is a compressive stress case.
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