1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Level set modeling of the orientation dependence of solid phase epitaxial regrowth
Rent:
Rent this article for
USD
10.1116/1.2823063
/content/avs/journal/jvstb/26/1/10.1116/1.2823063
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/1/10.1116/1.2823063
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Surface angle is measured from the ⟨100⟩ direction.

Image of FIG. 2.
FIG. 2.

Data for regrowth velocity and the fifth order polynomial fit vs surface angle.

Image of FIG. 3.
FIG. 3.

Regrowth without orientation dependence. The curve represents amorphous-crystalline interface with region below the curve being amorphous. Different curves represent the position of interface at different times.

Image of FIG. 4.
FIG. 4.

(a) Cross-sectional transmission electron microscopy image of a partially regrown amorphous-crystalline interface. (b) Simulation of interface (with orientation dependence). The region below the curve is crystalline and above is amorphous. Different curves represent different time points.

Image of FIG. 5.
FIG. 5.

[(a) and (b)] Simulations of regrowth using level set method for different points in time. (b) is for the smallest time followed by (a) and (b).

Image of FIG. 6.
FIG. 6.

[(a) and (b)] Simulations of regrowth with wider trenches (each contour represents different time instants).

Image of FIG. 7.
FIG. 7.

Simulations placed on top of TEM images (axis and scale matched). (a) shows regrowth without stress while (b) is a compressive stress case.

Loading

Article metrics loading...

/content/avs/journal/jvstb/26/1/10.1116/1.2823063
2008-01-31
2014-04-19
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Level set modeling of the orientation dependence of solid phase epitaxial regrowth
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/1/10.1116/1.2823063
10.1116/1.2823063
SEARCH_EXPAND_ITEM