1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Effective energy densities in KrF excimer laser reformation as a sidewall smoothing technique
Rent:
Rent this article for
USD
10.1116/1.2825163
/content/avs/journal/jvstb/26/1/10.1116/1.2825163
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/1/10.1116/1.2825163
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Illustration of laser reformation as a sidewall smoothing technique.

Image of FIG. 2.
FIG. 2.

SEM photos of (a) the as-fabricated in Si sidewall and the laser-reformed Si sidewall by 1 shot of laser pulse at the incident angles of incident angles of , , and in (b), (c), and (d), and by 5 shots of laser pulses at the incident angle of incident angles of , , and in (e), (f), and (g), respectively.

Image of FIG. 3.
FIG. 3.

AFM scans of (a) the as-etched Si surface and the laser-reformed Si surfaces at 1 shot of laser pulse at the incident angles of incident angles of , , , and in (b), (c), (d), and (e), and by 5 shots of laser pulses at the incident angle of incident angles of , , , and in (f), (g), (h), and (i), respectively.

Image of FIG. 4.
FIG. 4.

Relative transmittance of KrF excimer laser illumination on the Si sidewall at different incident angles on the substrate.

Image of FIG. 5.
FIG. 5.

Melting-front positions in Si surface illuminated with different energy densities at normal incidence.

Image of FIG. 6.
FIG. 6.

Melting-front positions in Si surface illuminated at different incident angles at oblique incidence.

Image of FIG. 7.
FIG. 7.

Residual root-mean-square roughness of etched Si surfaces illuminated with different effective energy densities.

Image of FIG. 8.
FIG. 8.

Operation range of energy densities at different incident angles (shaded area) and the minimum of interval-height ratios (dashed).

Image of FIG. 9.
FIG. 9.

Upper bounds of scattering loss with respect to laser reformation with different effective energy densities.

Loading

Article metrics loading...

/content/avs/journal/jvstb/26/1/10.1116/1.2825163
2008-01-04
2014-04-24
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effective energy densities in KrF excimer laser reformation as a sidewall smoothing technique
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/1/10.1116/1.2825163
10.1116/1.2825163
SEARCH_EXPAND_ITEM